By Dan Zhang, Bin Wei

This e-book introduces the state of the art applied sciences in mechatronics, robotics, and MEMS units to be able to increase their methodologies. It presents a follow-up to "Advanced Mechatronics and MEMS units" (2013) with an exploration of the main up to date applied sciences and their functions, proven via examples that supply readers insights and classes realized from real tasks. Researchers on mechatronics, robotics, and MEMS in addition to graduate scholars in mechanical engineering will locate chapters on:

  • Fundamental layout and dealing rules on MEMS accelerometers
  • Innovative cellular technologies
  • Force/tactile sensors development
  • Control schemes for reconfigurable robot systems
  • Inertial microfluidics
  • Piezoelectric strength sensors and dynamic calibration techniques

...And extra. Authors discover purposes within the parts of agriculture, biomedicine, complicated production, and house. Micro-assembly for present and destiny industries can be thought of, in addition to the layout and improvement of micro and clever manufacturing.

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Extra info for Advanced Mechatronics and MEMS Devices II

Example text

Mechatronics 22(3):251–256, Special Issue on Micro-Nano-Mechatronics 17. Knospe C (2011) Capillary force actuation: a mechatronic perspective. In: Eleftheriou E, Moheimani SOR (eds) Control technologies for emerging micro and nanoscale systems, vol 413, Lecture notes in control and information sciences. Springer, Berlin, pp 201–218 18. Wang H, Gaskins J, Knospe C, Reed M (2012) The capillary force actuator: design, fabrication, and characterization. In: 25th IEEE International Conference on Micro Electro Mechanical Systems, Paris, 29 Jan–2 Feb 19.

MEMS accelerometers are of sensitive and breakable structure, and thus they should be suitably packaged 40 A. H. Teay to withstand harsh environments without affecting their specifications. Sensitivity, resolutions and frequency range are the most important specifications that should be taken into account when choosing MEMS accelerometers Adequate performance tests of MEMS accelerometers should be conducted under different excitations signals including sinusoidal, impulse and random. The measured responses of the MEMS accelerometers shall also be compared with a well-calibrated type accelerometer.

Liu C, Kenny TW (2001) A high-precision, wide-bandwidth micromachined tunneling accelerometer. J Microelectromech Syst 10(3):425–433 10. Kim S-C, Wise KD (1983) Temperature sensitivity in silicon piezoresistive pressure transducers. IEEE Trans Electron Devices 30(7):802–810 11. Doll JC, Corbin EA, King WP, Pruitt BL (2011) Self-heating in piezoresistive cantilevers. Appl Phys Lett 98(22):223103 12. Zhou X, Che L, Liang S, Lin Y, Li X, Wang Y (2015) Design and fabrication of a MEMS capacitive accelerometer with fully symmetrical double-sided H-shaped beam structure.

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